Complementary Metal-oxide-semiconductor Compatible High Efficiency Subwavelength Grating Couplers for Silicon Integrated Photonics

TitleComplementary Metal-oxide-semiconductor Compatible High Efficiency Subwavelength Grating Couplers for Silicon Integrated Photonics
Publication TypeJournal Article
Year of Publication2012
AuthorsXu X, Subbaraman H, Covey J, Kwong D, Hosseini A, Chen RT
JournalApplied Physics Letters
Volume101
Pagination031109-1-4