Title | Transfer and Characterization of Silicon Nanomembrane Based Photonic Devices on Flexible Polymide Substrate |
Publication Type | Journal Article |
Year of Publication | 2011 |
Authors | Xu X, Subbaraman H, Pham D, Hosseini A, Lin X, Chen RT |
Journal | Proc. of SPIE |
Volume | 7944 |
Pagination | 7944OF-1-6 |
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