Transfer and Characterization of Silicon Nanomembrane Based Photonic Devices on Flexible Polymide Substrate

TitleTransfer and Characterization of Silicon Nanomembrane Based Photonic Devices on Flexible Polymide Substrate
Publication TypeJournal Article
Year of Publication2011
AuthorsXu X, Subbaraman H, Pham D, Hosseini A, Lin X, Chen RT
JournalProc. of SPIE
Volume7944
Pagination7944OF-1-6
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