Ultralow-loss Polycrystalline Silicon Waveguides and High Uniformity 1x12 MMI fanout for 3D Photonic Integration

TitleUltralow-loss Polycrystalline Silicon Waveguides and High Uniformity 1x12 MMI fanout for 3D Photonic Integration
Publication TypeJournal Article
Year of Publication2012
AuthorsKwong D, Covey J, Hosseini A, Zhang Y, Xu X, Chen RT
JournalOptics Express
Volume20
Pagination21722–21728
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