Vertically Integrated Double-Layer On-Chip Silicon Membranes for 1-to-12 waveguide fanouts

TitleVertically Integrated Double-Layer On-Chip Silicon Membranes for 1-to-12 waveguide fanouts
Publication TypeJournal Article
Year of Publication2012
AuthorsZhang Y, Hosseini A, Ahn J, Kwong DN, Fallahazad B, Tutuc E, Chen RT
JournalApplied Physics Letters
Volume100
Pagination181102-1-4
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