Title | Vertically Integrated Double-Layer On-Chip Silicon Membranes for 1-to-12 waveguide fanouts |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Zhang Y, Hosseini A, Ahn J, Kwong DN, Fallahazad B, Tutuc E, Chen RT |
Journal | Applied Physics Letters |
Volume | 100 |
Pagination | 181102-1-4 |
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