On-chip Intra-and Inter-layer Grating Couplers for 3D Integration of Silicon Photonics

TitleOn-chip Intra-and Inter-layer Grating Couplers for 3D Integration of Silicon Photonics
Publication TypeJournal Article
Year of Publication2013
AuthorsZhang Y, Kwong D, Xu X, Hosseini A, Yang SY, Rogers JA, Chen RT
JournalApplied Physics Letters
Volume102
Pagination211109
Attachment: